Numerical Modelling of the Electron Backscattering at the Variable Gas Pressure |
| M. Krysztof and W. Słówko
Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372 Wrocław, Poland |
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| The authors prepared a computer programme for simulations of electron flow in various gas conditions. This software combines a commercial programme SIMION 3D v. 7.0, destined for computations of charged particles trajectories in electric and magnetic fields, and the Monte Carlo one written by the authors in the SIMION internal language. The programme takes into consideration the electron scattering in elastic and inelastic collisions, the ionising avalanche and γ processes. This programme was used to investigate the secondary electron backscattering by gas filling the sample chamber of the environmental scanning electron microscope and its influence on the signal to noise ratio S/N and material contrast suppression. |
| DOI: 10.12693/APhysPolA.120.19 PACS numbers: 41.85.-p, 52.80.Dy |