ACTA

Cathodoluminescence Profiling for Checking Uniformity of ZnO and ZnCoO Thin Films

B.S. Witkowski^a, M.I. Łukasiewicz^a, E.A. Wolska^a, K. Kopalko^a, B.J. Kowalski^a, E. Guziewicz^a and M. Godlewski^{a, b}
^aInstitute of Physics, Polish Academy of Sciences, al. Lotników 32/46, 02-668 Warsaw, Poland
^bDept. of Mathematics and Natural Sciences College of Science, Cardinal S. Wyszyński University, Dewajtis 5, 01-815 Warsaw, Poland

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We employ scanning electron microscopy and cathodoluminescence for evaluation of uniformity of ZnCoO films obtained by the atomic layer deposition. Cathodoluminescence quenching by Co ions allows us to detect (regions of weaker light emission) Co accumulations, with the resolution limited by diffusion length of secondary carriers.

DOI: 10.12693/APhysPolA.119.675
PACS numbers: 81.15.Gh, 78.30.Fs, 78.60.Hk