Single-Mode Rib Wave-guides Fabricated by Means of Sol-Gel Method |
| P. Karasiński, C. Tyszkiewicz and R. Rogoziński
Department of Optoelectronics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland |
| Full Text PDF |
| Rib wave-guides were fabricated with the use of selective, wet chemical etching of two-component wave-guide films SiO2:TiO2 which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the films SiO2:TiO2 was carried out in water solution of ammonia fluoride. The paper presents the results of theoretical analysis as well as the power distributions in the fabricated strip wave-guides. |
| DOI: 10.12693/APhysPolA.118.1168 PACS numbers: 42.82.Et, 81.20.Fw, 07.07.Df |