Numerical Results of Modeling Semiconductor Sensor Layers in SAW Gas Sensors |
| T. Hejczyka, M. Urbańczykb and W.P. Jakubikc
aENTE Sp. z o.o., Gaudiego 7, 44-100 Gliwice, Poland bFaculty of Electrical Engineering, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland cInstitute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland |
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| The paper presents the numerical results of investigations of the layered gas surface acoustic waves sensor. The base electric load of the piezoelectric acoustic line is predicted by the effect of surface acoustic waves velocity changes vs. surface conductivity, which depends on the profile concentration by gas diffused molecules into the porous film. Inside the sensor layer Knudsen's model of gas diffusion was used. |
| DOI: 10.12693/APhysPolA.118.1158 PACS numbers: 77.65.Dq, 68.35.Iv, 07.07.Df |