Semiconductor Sensor Layer in SAW Gas Sensors Configuration |
| T. Hejczyka, M. Urbańczykb and W.P. Jakubikc
aWASKO S.A., Berbeckiego 6, 44-100 Gliwice, Poland bFaculty of Electrical Engineering, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland cInstitute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland |
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| A Rayleigh acoustic wave travelling on the surface of a semi-infinite piezoelectric medium may be changed by interaction with carriers and diffused gas in an adjacent semiconductor. The configuration, which uses a thin semiconductor film supported by a catalytic layer (Pd), is described in detail and the theoretical results of gas-sensor layer interaction are presented. |
| DOI: 10.12693/APhysPolA.118.1153 PACS numbers: 77.65.Dq, 68.35.Iv, 07.07.Df |