Analytical Model of Semiconductor Sensor Layers in SAW Gas Sensors |
| T. Hejczyka, M. Urbańczykb and W.P. Jakubikc
aENTE Sp. z o.o., Gaudiego 7, 44-100 Gliwice, Poland bFaculty of Electrical Engineering, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland cInstitute of Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland |
| Full Text PDF |
| In the paper a new theoretical model for analyzing a surface acoustic wave gas sensor is presented. Basing on the electric load of the piezoelectric acoustic line the effect of surface acoustic wave velocity changes vs. surface conductivity is predicted which depends on the profile concentration of gas molecules diffused into the porous film. Inside the sensor layer Knudsen's model of gas diffusion was used. |
| DOI: 10.12693/APhysPolA.118.1148 PACS numbers: 77.65.Dq, 68.35.Iv, 07.07.Df |