Modeling of Electron Kinetics in BF3

Ž. Nikitovića, O. Šašića, b, Z. Raspopovića, V. Stojanovića, S. Radovanovc, M. Mozetičd and U. Cvelbard a Institute of Physics, POB 68, 11080 Belgrade, Serbia b Faculty of Transport and Traffic Engineering, University of Belgrade, Belgrade, Serbia c Varian Semiconductor Equipment Associates, 35 Dory Road, GL-17, Gloucester, MA01930 USA d Jozef Stefan Institute, Jamova cesta 39, 1000 Ljubljana, Slovenia

Full Text PDF

In this paper we used the available data for the electron impact scattering cross sections BF3 to calculate the transport coefficients for electrons. Monte Carlo simulation was used to perform: calculations of the transport coefficients as well as the rate coefficients in DC electric fields, crossed electric and magnetic DC and RF fields.

DOI: 10.12693/APhysPolA.117.748 PACS numbers: 51.10.+y, 52.20.Fs, 52.65.Pp