Modeling of Electron Kinetics in BF3
Ž. Nikitovića, O. Šašića, b, Z. Raspopovića, V. Stojanovića, S. Radovanovc, M. Mozetičd and U. Cvelbard
a Institute of Physics, POB 68, 11080 Belgrade, Serbia
b Faculty of Transport and Traffic Engineering, University of Belgrade, Belgrade, Serbia
c Varian Semiconductor Equipment Associates, 35 Dory Road, GL-17, Gloucester, MA01930 USA
d Jozef Stefan Institute, Jamova cesta 39, 1000 Ljubljana, Slovenia
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In this paper we used the available data for the electron impact scattering cross sections BF3 to calculate the transport coefficients for electrons. Monte Carlo simulation was used to perform: calculations of the transport coefficients as well as the rate coefficients in DC electric fields, crossed electric and magnetic DC and RF fields.
DOI: 10.12693/APhysPolA.117.748
PACS numbers: 51.10.+y, 52.20.Fs, 52.65.Pp