Utilization of Digital Processing of the Optical Scanning Field View for Tip-Sample Distance Estimation during the Approach Procedure
A. Sikora a and Ł. Bednarz b
a Electrotechnical Institute, Division of Electrotechnology and Materials Science, M. Skłodowskiej-Curie 55/61, 50-369 Wrocław, Poland
b Faculty of Microsystems Electronics and Photonics, Wrocław University of Technology, Z. Janiszewskiego 11/17, 50-372 Wrocław, Poland
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In this article we present the method of determining the tip-sample distance using advanced data processing of scanning field's optical picture. This feature can reduce both: the approach process time and the risk of damaging the tip or the sample. Experimental results will be also presented.
DOI: 10.12693/APhysPolA.116.S-99
PACS numbers: 06.60.Sx, 07.05.Pj,07.79.-v