Planar Optical Waveguides Based on Thin ZnO Layers

P. Struka, T. Pustelnya, K. Gutb, K. Gołaszewskab, E. Kamińskab, M. Ekielskib, I. Pasternakb, E. Łusakowskac and A. Piotrowskab a Department of Optoelectronics at Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland b Institute of Electron Technology, al. Lotników 32/46, 02-668 Warsaw, Poland c Institute of Physics, PAS, al. Lotników 32/46, 02-668 Warsaw, Poland

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The paper quotes the results of investigations concerning planar optical waveguides with a high value of the refractive index, achieved basing on a broad band gap semiconductor ZnO, deposited on glass or quartz substrates. The investigations were focused on the properties of the waveguides, determining the modal characteristics, the attenuation coefficient and the structure of the surface.

DOI: 10.12693/APhysPolA.116.414 PACS numbers: 42.25.Hz, 42.25.-p, 42.70.-a, 42.82.-m, 42.82.Et, 68.35.Ct