Ion Beam Sputtering Monitored by Optical Spectroscopy |
| M. Ait El Fqiha,b, P. -G. Fourniera
a Laboratoire de Spectroscopie de Translation des Interactions Moléculaires, Université Paris-Sud, Bât. 478, 91405 Orsay, France, b Equipe SIAM - Département de Physique, Université Cadi Ayyad, Faculté des Sciences Semlalia, B.P. 2390, Marrakech, Maroc |
| Received: May 19, 2008; Revised version: November 23, 2008 |
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| Optical spectroscopy gives a simple means to follow the evolution of the surface composition during ion beam sputtering. This is illustrated by three examples: air oxidised metals (Al and Cu), various CuAl alloys and the Cu98Be2 alloy. Several time scales are distinguished, corresponding to different processes: the elimination of surface contaminants, the removal of the corroded layer. The implications for the use of ion beam optical spectroscopy in surface analysis are discussed. |
| DOI: 10.12693/APhysPolA.115.901 PACS numbers: 68.49.Sf, 79.20.Rf |