Planar Optical Waveguides for Application in Optoelectronic Gas Sensors
K. Golaszewska a, E. Kamińska a, T. Pustelny b, P. Struk b, T. Piotrowski a, A. Piotrowska a, M. Ekielski a, R. Kruszka a, M. Wzorek a, M. Borysiewicz a, I. Pasternak a and K. Gut b
a Institute of Electron Technology, al. Lotników 32/46, 02-668 Warsaw, Poland
b Department of Optoelectronics at Faculty of Mathematics and Physics, Silesian University of Technology, Krzywoustego 2, 44-100 Gliwice, Poland
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In the paper, the results of technological investigations on planar optical waveguides based on high band gap oxide semiconductors were presented. Investigations concerned the technologies of depositing very thin layers of: zinc oxide ZnO, titanium dioxide TiO2 and tin dioxide SnO2 on substrates of quartz glass plates. There were investigated both morphological structures of the produced layers and their optical properties. The paper also presents investigations on the technology of input-output light systems in the Bragg grating structures.
DOI: 10.12693/APhysPolA.114.A-223
PACS numbers: 42.82.Et, 07.07.Df, 42.79.Pw, 81.15.-z