Variable-Energy Positron Annihilation as Highly Sensitive Nanoporosimetry for Porous Thin Films
K. Ito and Y. Kobayashi
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST), Tsukuba, Ibaraki 305-8565, Japan
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Received: 20 09 2004;
Positron annihilation was applied to measuring critical pore sizes in various materials. In recent years, positron annihilation with a variable-energy positron beam has emerged as a powerful tool for the investigation of porous thin films synthesized as low-k dielectrics, high performance gas sensor materials, and so on. This paper is a brief overview of recent progress in nanopore characterization of thin films by means of positron annihilation with a description of several important issues relevant to positron annihilation.
DOI: 10.12693/APhysPolA.107.717
PACS numbers:78.70.Bj, 78.55.Mb