Porosity of Low-κ Materials Studied by Slow Positron Beam |
| R.S. Brusa, C. Macchi, S. Mariazzi and G.P. Karwasz
Dipartimento di Fisica, Università di Trento, 38050 Povo (Tn), Italy |
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| Received: 20 09 2004; |
| The information about porosity in low-κ materials obtainable by depth profiling with positron annihilation spectroscopy is reviewed. In particular we focus on Doppler broadening spectroscopy and 2-3γ ratio of positronium measurements on SiOCH and amorphous carbon a-C:F:H thin films produced by plasma enhanced chemical vapour deposition. |
| DOI: 10.12693/APhysPolA.107.702 PACS numbers:71.60.+z, 78.70.Bj, 68.60.Dv, 68.90.+g |