Channelling of H0 and H+ in Si Single Crystal |
| M. Moneta, K. Gront, T. Gwizdałła and J. Czerbniak Uniwersytet Łódzki, Instytut Fizyki, Katedra Fizyki Ciała Stałego, Pomorska 149, 90-236 Łódź, Poland |
| Received: May 6, 2002; revised version July 22, 2002 |
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| The differences in the Rutherford backscattering angular spectra measured for 100 keV hydrogen atoms H0 and protons H+ backscattered from Si crystal are reported and analysed. It was shown that the H0 atom beam is better channelled in the pure crystal and is much more sensitive to the crystal surface coverage, particularly Au layer than the H+ ion beam. The deep crystal regions seem to strengthen this differences. |
| DOI: 10.12693/APhysPolA.102.759 PACS numbers: 61.85.+p, 68.49.Sf, 61.80.Lj |