Investigation of Morphology and Chemical Composition of Self-Organized Semiconductor Quantum Dots and Wires by X-Ray Scattering
V. Holy, M. Meduna
Institute of Condensed Matter Physics, Masaryk University Brno, Czech Republic
J. Stangl, T. Roch and G. Bauer
Institute of Semiconductor Physics, Kepler University, Linz, Austria
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X-ray scattering methods suitable for the investigation of the morphology and chemical composition of self-organized quantum dots and quantum wires are reviewed. Their application is demonstrated in experimental examples showing that a combination of small angle X-ray scattering with high-resolution X-ray diffraction can reveal both the shape and the chemical composition of the self-organized objects.
DOI: 10.12693/APhysPolA.102.7
PACS numbers: 61.10.--i, 61.10.Dp