Investigation of Morphology and Chemical Composition of Self-Organized Semiconductor Quantum Dots and Wires by X-Ray Scattering |
| V. Holy, M. Meduna Institute of Condensed Matter Physics, Masaryk University Brno, Czech Republic J. Stangl, T. Roch and G. Bauer Institute of Semiconductor Physics, Kepler University, Linz, Austria |
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| X-ray scattering methods suitable for the investigation of the morphology and chemical composition of self-organized quantum dots and quantum wires are reviewed. Their application is demonstrated in experimental examples showing that a combination of small angle X-ray scattering with high-resolution X-ray diffraction can reveal both the shape and the chemical composition of the self-organized objects. |
| DOI: 10.12693/APhysPolA.102.7 PACS numbers: 61.10.--i, 61.10.Dp |